제목 Towards the realization of piezoelectric and dielectric driven nanowire resonators

저자 OH Byeong Gyun (발표자 학생), KIM Young Duck, CHO Myung Rae

분과 응용물리학분과 (Applied Physics Division)

  We give an update on our research thrust in realizing nanowire resonator structures actuated by their unique material properties. Namely, we aim to drive our nanowire structures at high-frequencies either by piezoelectric properties or by their dielectric properties (ZnO or AlN). These nanowire resonators are realized by various micromaching techniques. Differing approaches necessitated by various factors such as etch selectivity of the nanowire will be discussed. Furthermore, we will discuss applying the same actuation mechanism to detect resonant behavior.