resist baking temp / height before ashing / height after ashing / change
A2, EL11 : EL = 2 : 3 coating
4000rpm
O2 3V, 10W 3min
150 236.8 103 133.8
180 204.2 146 58.2
200 303.9 202 101.9
O2 3V, 20W 3min
150 250 0 250
180 310 75 235
200 275 45 230
