PMMA는 A2, A4, EL11 (아마도 905K )

http://www.microchem.com/products/pmma.htm

PR (AZ 5214, 5206)

TEXT Format

https://www.mff.ust.hk/mffdoc/safety/msds.htm

PDF Format

http://www.prism.princeton.edu/PRISM_cleanroom/MSDS.htm

스핀 코팅 RPM에 따른 두께, Bake 온도, developer, 제거하기 위해 사용하는 용액 조사

ZEP520A, PMMA, MMA, HSQ(XR-1541), ma-N 2403

http://www.nanolithography.gatech.edu/processes.html